Xiaoxu Kang, Qingyun Zuo, Jiaqing Li, Chao Yuan, Yuhang Zhao. CMOS compatible MEMs process for post interconnect single chip integration application. In 2011 IEEE 9th International Conference on ASIC, ASICON 2011, Xiamen, China, October 25-28, 2011. pages 437-440, IEEE, 2011. [doi]
Abstract is missing.