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Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication

Yu-Ting Kao, Shi-Chung Chang, Chun-Ming Chang. Target setting with consideration of target-induced operation variability for performance improvement of semiconductor fabrication. In 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014. pages 774-779, IEEE, 2014. [doi]

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