High-speed on-chip local flow control by synchronized actuation of piezo-driven dual membrane pumps

Yusuke Kasai, Shinya Sakuma, Takeshi Hayakawa, Fumihito Arai. High-speed on-chip local flow control by synchronized actuation of piezo-driven dual membrane pumps. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2016, Nagoya, Japan, November 28-30, 2016. pages 1-2, IEEE, 2016. [doi]

Abstract

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