How particle detector can aid visual inspection for defect detection of TFT-LCD manufacturing

Marzieh Khakifirooz, Mahdi Fathi. How particle detector can aid visual inspection for defect detection of TFT-LCD manufacturing. In Monica Tentori, Nadir Weibel, Kristof Van Laerhoven, Gregory D. Abowd, Flora D. Salim, editors, UbiComp/ISWC '20: 2020 ACM International Joint Conference on Pervasive and Ubiquitous Computing and 2020 ACM International Symposium on Wearable Computers, Virtual Event, Mexico, September 12-17, 2020. pages 547-552, ACM, 2020. [doi]

Abstract

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