Simulation of a Full 300mm Semiconductor Manufacturing Plant with Material Handling Constraints

Jean-Etienne Kiba, Stéphane Dauzère-Pérès, Claude Yugma, Gilles Lamiable. Simulation of a Full 300mm Semiconductor Manufacturing Plant with Material Handling Constraints. In Ann Dunkin, Ricki G. Ingalls, Enver Yücesan, Manuel D. Rossetti, Ray Hill, Björn Johansson, editors, Proceedings of the 2009 Winter Simulation Conference, WSC 2009, Hilton Austin Hotel, Austin, TX, USA, December 13-16, 2009. pages 1601-1609, WSC, 2009. [doi]

Abstract

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