Dong-Yeop Kim, Jindo Byun, Sang-Hoon Lee, Se-Jang Oh, Ki-Sang Kang, Hai-Young Lee. Signal Integrity Improvements of a MEMS Probe Card Using Back-Drilling and Equalizing Techniques. IEEE T. Instrumentation and Measurement, 60(3):872-879, 2011. [doi]
Abstract is missing.