Ji Hong Kim, Sung-Min Hong, Jang Sub Lee, Byung-Moo Moon, Kunnyun Kim. High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 703-706, IEEE, 2009. [doi]
Abstract is missing.