Reliability improvement by the suppression of keyhole generation in W-plug vias

Jong-Hun Kim, Kyosun Kim, Seok Hee Jeon, Jong-Tae Park. Reliability improvement by the suppression of keyhole generation in W-plug vias. Microelectronics Reliability, 45(9-11):1455-1458, 2005. [doi]

Abstract

Abstract is missing.