Fluorine improvement of MOSFET interface as revealed by RTS measurements and HRTEM

Joo-Hyung Kim, Jung Joo Kim, Chang-Eun Lee, Jong-Ho Lee, Dong-Seok Kim, Nam Joo Kim, Kwang Dong Yoo, Heung-Soo Park. Fluorine improvement of MOSFET interface as revealed by RTS measurements and HRTEM. In 2013 IEEE Radio and Wireless Symposium, Austin, TX, USA, January 20-23, 2013. pages 97-99, IEEE, 2013. [doi]

Abstract

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