Transient self-heating modeling and simulations of back-end-of-line interconnects

Andrew Kim, Baozhen Li, Barry P. Linder. Transient self-heating modeling and simulations of back-end-of-line interconnects. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 2-1, IEEE, 2018. [doi]

Abstract

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