Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens

In-Joong Kim, Ilgu Yun. Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens. IEEE Transactions on Industrial Electronics, 63(9):5674-5681, 2016. [doi]

Abstract

Abstract is missing.