Martin Kleindienst, Stefan Koch 0002, Markus Reichhartinger. Model-based Temperature Control of a Continuous Flow Heater for Efficient Processing of Silicon Wafers. In 2020 IEEE Conference on Control Technology and Applications, CCTA 2020, Montreal, QC, Canada, August 24-26, 2020. pages 1-6, IEEE, 2020. [doi]
Abstract is missing.