A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing

Andreas Klemmt, Jan Lange, Gerald Weigert, Frank Lehmann, Jens Seyfert. A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing. In Proceedings of the 2010 Winter Simulation Conference, WSC 2010, Baltimore, Maryland, USA, 5-8 December 2010. pages 2474-2485, WSC, 2010. [doi]

Abstract

Abstract is missing.