Tihomir Knezevic, Tomislav Suligoj, Xingyu Liu, Lis K. Nanver, Ahmed ElSayed, Jan F. Dick, Jörg Schulze. Back-end-of-line CMOS-compatible diode fabrication with pure boron deposition down to 50 °C. In 49th European Solid-State Device Research Conference, ESSDERC 2019, Cracow, Poland, September 23-26, 2019. pages 242-245, IEEE, 2019. [doi]
Abstract is missing.