Self-Aligned Double and Quadruple Patterning-aware grid routing with hotspots control

Chikaaki Kodama, Hirotaka Ichikawa, Koichi Nakayama, Toshiya Kotani, Shigeki Nojima, Shoji Mimotogi, Shinji Miyamoto, Atsushi Takahashi. Self-Aligned Double and Quadruple Patterning-aware grid routing with hotspots control. In 18th Asia and South Pacific Design Automation Conference, ASP-DAC 2013, Yokohama, Japan, January 22-25, 2013. pages 267-272, IEEE, 2013. [doi]

Abstract

Abstract is missing.