A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing

Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing. In 14th Conference on Ph.D. Research in Microelectronics and Electronics, PRIME 2018, Prague, Czech Republic, July 2-5, 2018. pages 53-56, IEEE, 2018. [doi]

Abstract

Abstract is missing.