Microstructure and ferroelectricity of barium titanate thin films on Si for integrated photonics

Kristy J. Kormondy, Alexander A. Demkov, Youri Popoff, Marilyne Sousa, Felix Eltes, Daniele Caimi, Chiara Marchiori, Jean Fompeyrine, Stefan Abel. Microstructure and ferroelectricity of barium titanate thin films on Si for integrated photonics. In 2017 IEEE International Conference on IC Design and Technology, ICICDT 2017, Austin, TX, USA, May 23-25, 2017. pages 1-2, IEEE, 2017. [doi]

Abstract

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