Monitoring in semiconductor manufacturing: A contribution to diagnosis in complex computer systems

Gerolf Kotte, Klaus Kabitzsch. Monitoring in semiconductor manufacturing: A contribution to diagnosis in complex computer systems. In 5th European Control Conference, ECC 1999, Karlsruhe, Germany, August 31 - September 3, 1999. pages 2154-2159, IEEE, 1999. [doi]

Abstract

Abstract is missing.