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Properties of contactless and contacted charging in MEMS capacitive switches

M. Koutsoureli, L. Michalas, P. Martins, E. Papandreou, A. Leuliet, S. Bansropun, George Papaioannou, A. Ziaei. Properties of contactless and contacted charging in MEMS capacitive switches. Microelectronics Reliability, 53(9-11):1655-1658, 2013. [doi]

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