A nondestructive automated defect detection system for silicon carbide wafers

Toshiro Kubota, Parag Talekar, Xianyun Ma, Tangali S. Sudarshan. A nondestructive automated defect detection system for silicon carbide wafers. Mach. Vis. Appl., 16(3):170-176, 2005. [doi]

Abstract

Abstract is missing.