Effect of substrate position on Structural, Morphological, and optical properties of reactively sputtered ZnO thin films

J. Vinoth Kumar, Y. Matsumoto, A. Maldonado, M. de la L. Olvera. Effect of substrate position on Structural, Morphological, and optical properties of reactively sputtered ZnO thin films. In 13th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2016, Mexico City, Mexico, September 26-30, 2016. pages 1-4, IEEE, 2016. [doi]

Abstract

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