2 70% efficient 500MHz fully integrated digitally controlled 3-level buck voltage regulator with on-die high density MIM capacitor in 22nm tri-gate CMOS

Pavan Kumar, Vaibhav A. Vaidya, Harish Krishnamurthy, Stephen T. Kim, George E. Matthew, Sheldon Weng, Bharani Thiruvengadam, Wayne Proefrock, Krishnan Ravichandran, Vivek De. 2 70% efficient 500MHz fully integrated digitally controlled 3-level buck voltage regulator with on-die high density MIM capacitor in 22nm tri-gate CMOS. In 2015 IEEE Custom Integrated Circuits Conference, CICC 2015, San Jose, CA, USA, September 28-30, 2015. pages 1-4, IEEE, 2015. [doi]

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