Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net

Chung-Hsien Kuo, Chao-Hsiung Wang, Kuo-Wei Huang. Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 33(5):641-648, 2003.

Abstract

Abstract is missing.