Influence of the manufacturing process on the electrical properties of thin (k stacks observed with CAFM

M. Lanza, M. Porti, M. Nafría, Guenther Benstetter, Werner Frammelsberger, H. Ranzinger, E. Lodermeier, G. Jaschke. Influence of the manufacturing process on the electrical properties of thin (k stacks observed with CAFM. Microelectronics Reliability, 47(9-11):1424-1428, 2007. [doi]

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