Effect of a trace of water vapor on Ohmic contact formation for AlGaN/GaN epitaxial wafers

W. S. Lau, W. T. Wong, Joy B. H. Tan, B. P. Singh. Effect of a trace of water vapor on Ohmic contact formation for AlGaN/GaN epitaxial wafers. Microelectronics Reliability, 48(5):794-797, 2008. [doi]

Abstract

Abstract is missing.