Observation of halo implant from the drain side reaching the source side and vice versa in extremely short p-channel transistors

W. S. Lau, Peizhen Yang, Eng Hua Lim, Yee Ling Tang, Seow Wei Lai, V. L. Lo, S. Y. Siah, L. Chan. Observation of halo implant from the drain side reaching the source side and vice versa in extremely short p-channel transistors. Microelectronics Reliability, 50(3):346-350, 2010. [doi]

Abstract

Abstract is missing.