Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators

Sangwoo Lee, Sangjun Park 0001, Sangwoo Yi, SangChul Lee, Dong-Il Dan Cho, Byeoungju Ha, Yongsoo Oh, Cimoo Song. Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators. In Proceedings 1999 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human and Environment Friendly Robots with High Intelligence and Emotional Quotients, October 17-21,1999, Hyundai Hotel, Kyongju, Korea. pages 1057-1062, IEEE, 1999. [doi]

Abstract

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