Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si Micro-machined Structure

Sukhan Lee, Jaewoo Chung, Seungmo Lim, Changseung Lee. Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si Micro-machined Structure. In Proceedings of the 2001 IEEE International Conference on Robotics and Automation, ICRA 2001, May 21-26, 2001, Seoul, Korea. pages 616-619, IEEE, 2001.

Authors

Sukhan Lee

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Jaewoo Chung

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Seungmo Lim

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Changseung Lee

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