Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si Micro-machined Structure

Sukhan Lee, Jaewoo Chung, Seungmo Lim, Changseung Lee. Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si Micro-machined Structure. In Proceedings of the 2001 IEEE International Conference on Robotics and Automation, ICRA 2001, May 21-26, 2001, Seoul, Korea. pages 616-619, IEEE, 2001.

@inproceedings{LeeCLL01,
  title = {Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si Micro-machined Structure},
  author = {Sukhan Lee and Jaewoo Chung and Seungmo Lim and Changseung Lee},
  year = {2001},
  researchr = {https://researchr.org/publication/LeeCLL01},
  cites = {0},
  citedby = {0},
  pages = {616-619},
  booktitle = {Proceedings of the 2001 IEEE International Conference on Robotics and Automation, ICRA 2001, May 21-26, 2001, Seoul, Korea},
  publisher = {IEEE},
  isbn = {0-7803-6578-X},
}