Leakage characteristics for the buried photodiode structure on vertical CMOS image sensors

Sang-Gi Lee, Su Lim, Chang-Eun Lee, Jeong Su Park, Sun-Kyung Bang, Sung-Hyun Kang, Russel A. Martin, Sanghoon Bae, Jin-Won Park. Leakage characteristics for the buried photodiode structure on vertical CMOS image sensors. In Russel A. Martin, Jeffrey M. DiCarlo, Nitin Sampat, editors, Digital Photography III, San Jose, CA, USA, January 29-30, 2007. Volume 6502 of SPIE Proceedings, pages 650206, SPIE, 2007. [doi]

Abstract

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