Study on scalability of hybrid junctionless FinFET and multi-stacked nanowire FET by TCAD simulation

ChengKuei Lee, Sen Yin, Jinyu Zhang, Yan Wang 0023, Zhiping Yu. Study on scalability of hybrid junctionless FinFET and multi-stacked nanowire FET by TCAD simulation. IEICE Electronic Express, 15(21):20180884, 2018. [doi]

Abstract

Abstract is missing.