Advances of CMOS-MEMS technology for resonator applications

Sheng-Shian Li. Advances of CMOS-MEMS technology for resonator applications. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 520-523, IEEE, 2013. [doi]

Abstract

Abstract is missing.