Deep trench junction termination employing variable-K dielectric for high voltage devices

Huan Li, Xingbi Chen. Deep trench junction termination employing variable-K dielectric for high voltage devices. In 2015 IEEE 11th International Conference on ASIC, ASICON 2015, Chengdu, China, November 3-6, 2015. pages 1-4, IEEE, 2015. [doi]

Abstract

Abstract is missing.