Learning-based release control of semiconductor wafer fabrication facilities

Li Li, Zhongbo Chen, Qingyun Yu, Nan Xiang. Learning-based release control of semiconductor wafer fabrication facilities. In Proceedings of the 2015 Winter Simulation Conference, Huntington Beach, CA, USA, December 6-9, 2015. pages 2965-2973, IEEE/ACM, 2015. [doi]

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