Pei Ling Li, Chie Gau, Bau Tong Dai, Chien-Wei Liu. Study of silicon nitride film embedded with silicon quantum dots. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 646-649, IEEE, 2011. [doi]
Abstract is missing.