Fabrication and analysis of integrated MEMS pyramidal horn antenna for terahertz applications

C. Li, L. Guo, W. G. Wu, X. S. Tang, F. Y. Huang. Fabrication and analysis of integrated MEMS pyramidal horn antenna for terahertz applications. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 611-614, IEEE, 2012. [doi]

Abstract

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