Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate

L. Li, K. Ishii, Y. Tsutsui, S. Shoji, J. Mizuno. Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 27-30, IEEE, 2012. [doi]

Abstract

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