Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

Junhong Li, Wei Ren, Guoxiang Fan, Chenghao Wang. Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film. Sensors, 17(6):1381, 2017. [doi]

Abstract

Abstract is missing.