Identifying Lithography Weak-Points of Standard Cells with Partial Pattern Matching

Yongfu Li, I-Lun Tseng, Zhao Chuan Lee, Valerio Perez, Vikas Tripathi, Yoong Seang Jonathan Ong. Identifying Lithography Weak-Points of Standard Cells with Partial Pattern Matching. In 2018 IEEE Computer Society Annual Symposium on VLSI, ISVLSI 2018, Hong Kong, China, July 8-11, 2018. pages 417-422, IEEE Computer Society, 2018. [doi]

Abstract

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