The realization of ZrOxNy temperature sensors with good sensitivity and stability in the temperature range above 150K

Yanjie Li, Minmin You, Xun Gong, Xiu-Yan Li, Zude Lin, Jingquan Liu. The realization of ZrOxNy temperature sensors with good sensitivity and stability in the temperature range above 150K. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1165-1168, IEEE, 2021. [doi]

Authors

Yanjie Li

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Minmin You

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Xun Gong

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Xiu-Yan Li

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Zude Lin

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Jingquan Liu

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