Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

Xinxin Li, Haitao Yu, Xiaohua Gan, Xiaoyuan Xia, Pengcheng Xu, Jungang Li, Min Liu, Yongxiang Li. Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection. J. Sensors, 2009, 2009. [doi]

Abstract

Abstract is missing.