CMOS-compatible silicon double-etched apodized waveguide grating couplers for high efficient coupling

Chao Li, Huijuan Zhang, Mingbin Yu, Guo-Qiang Lo. CMOS-compatible silicon double-etched apodized waveguide grating couplers for high efficient coupling. In 2013 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), Anaheim, CA, USA, March 17-21, 2013. pages 1-3, IEEE, 2013. [doi]

Abstract

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