Convergence Rate Oriented Iterative Feedback Tuning With Application to an Ultraprecision Wafer Stage

Min Li 0016, Yu Zhu, Kaiming Yang, Laihao Yang, Chuxiong Hu, Haihua Mu. Convergence Rate Oriented Iterative Feedback Tuning With Application to an Ultraprecision Wafer Stage. IEEE Transactions on Industrial Electronics, 66(3):1993-2003, 2019. [doi]

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