Precision motion control of a linear piezoelectric ultrasonic motor stage

Wenyu Liang, Sunan Huang 0001, Si-Lu Chen, Kok Kiong Tan. Precision motion control of a linear piezoelectric ultrasonic motor stage. In 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013. pages 164-169, IEEE, 2013. [doi]

Abstract

Abstract is missing.