Precision motion control of a linear piezoelectric ultrasonic motor stage

Wenyu Liang, Sunan Huang 0001, Si-Lu Chen, Kok Kiong Tan. Precision motion control of a linear piezoelectric ultrasonic motor stage. In 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013. pages 164-169, IEEE, 2013. [doi]

@inproceedings{Liang0CT13,
  title = {Precision motion control of a linear piezoelectric ultrasonic motor stage},
  author = {Wenyu Liang and Sunan Huang 0001 and Si-Lu Chen and Kok Kiong Tan},
  year = {2013},
  doi = {10.1109/AIM.2013.6584086},
  url = {https://doi.org/10.1109/AIM.2013.6584086},
  researchr = {https://researchr.org/publication/Liang0CT13},
  cites = {0},
  citedby = {0},
  pages = {164-169},
  booktitle = {2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013},
  publisher = {IEEE},
  isbn = {978-1-4673-5319-9},
}