Model Predictive Control With Obstacle Avoidance for Inertia Actuated AFM Probes Inside a Scanning Electron Microscope

Shuai Liang, Mokrane Boudaoud, Pascal Morin, Jonathan Cailliez, Barthelemy Cagneau, Weibin Rong, Stephane Régnier. Model Predictive Control With Obstacle Avoidance for Inertia Actuated AFM Probes Inside a Scanning Electron Microscope. IEEE Robotics and Automation Letters, 6(1):382-388, 2021. [doi]

Abstract

Abstract is missing.