Shape Fitting for the Shape Control System of Silicon Single Crystal Growth

Junli Liang, Miaohua Zhang, Ding Liu, Wenyi Wang. Shape Fitting for the Shape Control System of Silicon Single Crystal Growth. IEEE Trans. Industrial Informatics, 11(2):363-374, 2015. [doi]

Authors

Junli Liang

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Miaohua Zhang

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Ding Liu

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Wenyi Wang

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