Undercut edges for robust capillary self-alignment in hybrid microassembly

Ville Liimatainen, Veikko Sariola, Quan Zhou. Undercut edges for robust capillary self-alignment in hybrid microassembly. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1088-1091, IEEE, 2013. [doi]

Abstract

Abstract is missing.