Youzuo Lin, Yudhishthir Kandel, Matthew Zotta, Eric Lifshin. SEM resolution improvement using semi-blind restoration with hybrid L1-L2 regularization. In 2016 IEEE Southwest Symposium on Image Analysis and Interpretation, SSIAI 2016, Santa Fe, NM, USA, March 6-8, 2016. pages 33-36, IEEE Computer Society, 2016. [doi]
Abstract is missing.