Improving and optimizing reliability in future technologies with high-κ dielectrics

Barry P. Linder, E. Cartier, S. Krishnan, E. Wu. Improving and optimizing reliability in future technologies with high-κ dielectrics. In 2013 International Symposium on VLSI Design, Automation, and Test, VLSI-DAT 2013, Hsinchu, Taiwan, April 22-24, 2013. pages 1-4, IEEE, 2013. [doi]

Abstract

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